JPH0312676B2 - - Google Patents

Info

Publication number
JPH0312676B2
JPH0312676B2 JP61113756A JP11375686A JPH0312676B2 JP H0312676 B2 JPH0312676 B2 JP H0312676B2 JP 61113756 A JP61113756 A JP 61113756A JP 11375686 A JP11375686 A JP 11375686A JP H0312676 B2 JPH0312676 B2 JP H0312676B2
Authority
JP
Japan
Prior art keywords
stage
pump
dry vacuum
vacuum pump
labyrinth seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61113756A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62271973A (ja
Inventor
Katsumi Hikuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DAIA SHINKU KK
Original Assignee
DAIA SHINKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DAIA SHINKU KK filed Critical DAIA SHINKU KK
Priority to JP11375686A priority Critical patent/JPS62271973A/ja
Publication of JPS62271973A publication Critical patent/JPS62271973A/ja
Publication of JPH0312676B2 publication Critical patent/JPH0312676B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP11375686A 1986-05-20 1986-05-20 ドライ真空ポンプのラビリンスシ−ル Granted JPS62271973A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11375686A JPS62271973A (ja) 1986-05-20 1986-05-20 ドライ真空ポンプのラビリンスシ−ル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11375686A JPS62271973A (ja) 1986-05-20 1986-05-20 ドライ真空ポンプのラビリンスシ−ル

Publications (2)

Publication Number Publication Date
JPS62271973A JPS62271973A (ja) 1987-11-26
JPH0312676B2 true JPH0312676B2 (en]) 1991-02-20

Family

ID=14620339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11375686A Granted JPS62271973A (ja) 1986-05-20 1986-05-20 ドライ真空ポンプのラビリンスシ−ル

Country Status (1)

Country Link
JP (1) JPS62271973A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2690098B2 (ja) * 1988-03-03 1997-12-10 ファナック株式会社 レーザ発振装置
JP2002257070A (ja) * 2001-02-28 2002-09-11 Toyota Industries Corp 真空ポンプにおける軸封構造

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52106110A (en) * 1976-03-03 1977-09-06 Hitachi Ltd Rotating air tight seal mechanism

Also Published As

Publication number Publication date
JPS62271973A (ja) 1987-11-26

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